Ultra Clean Processing Of Semiconductor Surfaces Xvi

半导体表面超洁净加工：第十六届半导体表面超洁净加工国际研讨会同行评审全文论文精选

[Dr. Paul Mertens]

TN

9783036403120  EUR270.0

Trans Tech Publications   2023-09-01   Paperback

Semiconductor/ etching/ cleaning/ interconnects/ dielectrics/ surface chemistry/ integrated circuit/ wafer/ silicon/ germanium/ gallium nitride/ pattern collapse/ nanopillars/ molecular dynamics simulation/ contaminations/ defects/ sustainability/ semicon